Duracraft™ Heavy Gauge Diffusion Heating Elements

DC-1300

For: Cost-Effective High Temperature Operation

The advanced thermal engineering of the DC-1300 furnace elements provide dependable performance at the lowest cost. Power is balanced between center and end zones, providing precise temperature uniformity at varied operating temperatures while reducing heat loss.

For all high temperature processes including silicon nitride and HTO LPCVD, oxidation, anneal, and drive-in. Ideal for horizontal furnace retrofits.

DC-1300Plus

For: High Temperature Operation – Improved Performance for Repeated Temperature Cycling

The addition of self-locking spacers to the DC-1300 design allow the DC-1300Plus furnace elements to provide consistent, reliable operation throughout the fluctuations of repeated temperature cycling.

Ideal for all high temperature processes including silicon nitride and HTO LPCVD, oxidation, anneal, and drive-in.

The Benefits of Self-Locking Spacers
Rows of self-locking spacers lock together around the circumference of the element, maintaining constant coil spacing and total support of each turn of the resistance coil. This design keeps the coil and spacers in place throughout repeated temperature cycling.

DCHT-500

For:

DCHT-500 furnace elements deliver dependable performance and long life even at the highest processing temperatures. Self-locking spacers and superior element design reduce the possibility for element sag. Like the DC1300, power is balanced between center and end zones, providing precise temperature uniformity at varied temperatures while reducing heat loss. The DCHT-500 includes heavy gauge, Kanthal™ APM powdered-metal heating wire for the longest life available and decreased element sag.

The DCHT-500 is a must for well drive, field oxidation, LOCOS, and other long, high-temperature processes.

The Benefits of Kanthal™ APM Powdered-Metal Wire
Kanthal™ APM powdered-metal wire increases the overall effectiveness of a heating element in high temperature applications. At 1100°C, powdered metal wire lasts twice as long as conventional heating element wire. At lower temperatures, the difference is even greater. At high temperatures, powdered-metal wire also shows superior resistance to sagging. The chart shows relative sag between conventional-alloy heating elements and powdered-metal elements. Powdered-metal wire also has a higher tolerance to corrosive atmospheres, making it a better choice for processes employing HCI.

Specifications

DC-1300

• Operating Temperature: 400°C-1300°C
• Shell: Stainless Steel
• Insulation: Layer 1, 97% Alumina blanket against heating element, Layer 2, 50% Alumina/50% Silica blanket
• Wire: Heavy Gauge FeCrAl
• Bore Size: Custom, please specify
• Application: Vertical or Horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5 years at the low to mid-temperature range
• Life Span: Typical

DC-1300Plus

• Operating Temperature: 400°C-1300°C
• Shell: Stainless Steel
• Insulation: Layer 1, 97% Alumina blanket against heating element, Layer 2, 50% Alumina/50% Silica blanket
• Wire: Heavy Gauge FeCrAl
• Bore Size: Custom, please specify
• Application: Vertical or Horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5 years at the low to mid-temperature range
• Life Span: Typical

DCHT-500

• Operating Temperature: 400°C-1300°C
• Shell: Stainless Steel
• Insulation: Layer 1, 97% Alumina blanket against heating element, Layer 2, 50% Alumina/50% Silica blanket
• Wire: Heavy Gauge Kanthal™ APM powdered metal FeCrAl
• Bore Size: Custom, please specify
• Application: Vertical or Horizontal, LPCVD and oxidation/diffusion processes, up to 1300°C, with typical lifetimes of 5+ years, even for long, high temperature processes
• Life Span: Longer than Typical